Comment by looofooo0
4 days ago
?? ASML builds the EUV machines in Europe. Zeiss builds the optical compentents in Europe. Trumpf builds ne EUV-Laser in Europe.
Moreover, most of the tech stems from the European-funded EUCLIDES (Extreme UV Concept Lithography Development System) project.
You’re forgetting about 2 decades of US DoE funding of EUV research through EUV-LLC which ASML joined late. A lot of the early groundwork and foundational research was done by DoE including using US built synchrotron accelerators to try out various early approaches.
Yes, I think the route was Soviet Union, Japan, USA, Europe.